Thin Films & Oxides
Si-Mat can provide all of your wafer film requirements.
Please contact Si-Mat for more information.
|
| Oxide: |
Thermal Oxide
Low Temperature Oxide (LTO)
Thick Oxide (>25KA)
PETEOS |
| Nitride: |
Plasma Nitride
Oxy Nitride (SiON)
LPCVD Nitride |
| Specialty Films: |
Silicon Carbide
BPSG
Polysilicon
Photolithography Service
Spin on Resist
Damascene Copper |
| Metals: |
PVD, CVD, and Electro-plated
Ta, TaN, Ti, TiN, TiW, W, WN,
Cu, Al, Al-Cu, Al-Si-Cu
Precious Metals |
| |
|
