Thin Films & Oxides

Si-Mat can provide all of your wafer film requirements. For special requests, please feel free to contact us at any time.

Oxide: Thermal Oxide
Low Temperature Oxide (LTO)
Thick Oxide (>25KA)
Nitride: Plasma Nitride
Oxy Nitride (SiON)
LPCVD Nitride
Specialty Films: Silicon Carbide
Photolithography Service
Spin on Resist
Damascene Copper
Metals: PVD, CVD, and Electro-plated
Ta, TaN, Ti, TiN, TiW, W, WN,
Cu, Al, Al-Cu, Al-Si-Cu
Precious Metals
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